FR-pRo tool is assembled by user selected modules. The Core Unit accommodate the light source, the spectrometer (for any spectral regime in the 200nm- 2500nm range) and the control & communication electronics.
FR-pRo tool is assembled by user selected modules. The Core Unit accommodate the light source, the spectrometer (for any spectral regime in the 200nm- 2500nm range) and the control & communication electronics.
KEY FEATURES
KEY FEATURES The WL3500 is an automatic white light interferometry 3D profiler driven by a sub micron resolution XY Linear Motor stage. Designed on the basis of a solid granite tabletop gantry frame structure, it maximizes the stability of the interferometer, which is very sensitive to vibration, and measures the 3D structure and roughness of the 200mm / 300mm wafer surface precisely with the stable suction power of the variable vacuum chuck .
