Low Pressure Plasma
1. Zepto
Basic equipment
- The housing size varies depending on the components/options
- Chamber volumes: 1.7 - 2.6 litres, depending on the version.
- Power supply: 230 V
Gas supply
- Needle valve
- Mass Flow Controllers (MFCs)
Vacuum chambers
- Quartz glass (UHP) round with lid
(approx. ∅ 105 mm, L 200 mm or L 300 mm)
- Borosilicate glass (UHP) round with lid
(approx. ∅ 105 mm, L 200 mm or L 300 mm)
Load
- Product carrier: Aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes
- Single, or multiple levels
Control
- Manual
- PCCE control (Microsoft Windows CE)
- PC control (Microsoft Windows POS Ready 2009)
Pressure measurement
Timer
Generators Frequencies:
- 40 kHz: Power 0 - 100 W
- 13.56 MHz: Power 0 - 50 W
Vacuum pumps:
- In different sizes and from various manufacturers (as required with activated carbon filter)
2. Pico
Basic equipment
- The housing size varies depending on the components/options
- Chamber volumes: 4 - 15 litres, depending on the version
- Power supply: 230 V for table top systems, 400 V/3-phase for stand-alone systems
Gas supply
- Needle valve
- Mass Flow Controllers (MFCs)
Vacuum chambers
- Stainless steel, round, with lid
(approx. ∅ 150 mm, L 320 mm or L 600 mm) or
- Stainless steel, rectangular, with hinged door
(approx. W 160 x H 160 x D 325 or 600mm)
- Aluminium, round, with lid or hinged door
(approx. ∅ 130 mm, L 300 mm or L 600 mm)
- Quartz glass (UHP), round, with lid or hinged door
(approx. ∅ 130 mm, L 300 mm or L 600 mm)
- Borosilicate glass (UHP), round, with lid
(approx. ∅130 mm, L 300 mm or L 600 mm)
Loading
- Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes
- Single, or multiple levels
- RIE
Control
- Semi-automatic
- PCCE control (Microsoft Windows CE)
- PC control (Microsoft Windows POS Ready 2009)
Pressure Measurement
- Pirani
- Baratron (for corrosive gas version)
Timer
Generators Frequencies:
- 40 kHz: Power 0 - 200 W; 0 -1000 W
- 13.56 MHz: Power 0 - 50 W; 0 - 100 W; 0 - 300 W
- 2.45 GHz: Power 0 - 300 W
All generators are continuously adjustable from 0 - 100%
Vacuum pumps:
- In different sizes and from various manufacturers (as required with activated carbon filter)
3. Nano
Basic equipment
- The housing size varies depending on the components/options
- Chamber volumes: 18 - 36 litres, depending on the version
- Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices
Gas supply
- Needle valve
- Mass Flow Controllers (MFCs)
Vacuum chambers
- Stainless steel, round, with lid (approx. ∅ 267 mm, L 420 mm or L 600 mm) or
- Stainless steel, rectangular, hinged door (approx. W 240 mm x D 420 mm or 600 mm)
- Aluminium, round, with lid or hinged door (approx. ∅ 240 mm, L 400 mm or L 600 mm)
- Quartz glass (UHP), round, with lid or hinged door (approx. ∅ 240 mm, L 400 mm or L 600 mm)
- Borosilicate glass (UHP), round, with lid or hinged door (approx.∅ 240 mm, L 400 mm or L 600 mm)
Loading
- Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes
- Single, or multiple levels
- RIE
Control
- Semi-automatic
- PCCE control (Microsoft Windows CE)
- PC control (Microsoft Windows POS Ready 2009)
Pressure Measurement
- Pirani
- Baratron (for corrosive gas version)
Timer
Generators Frequencies:
- 40 kHz: Power 0 - 300 W; 0 - 1000 W
- 13.56 MHz: Power 0 - 100 W; 0 - 300 W
- 2.45 GHz: Power 0 - 600 W;
All generators are continuously adjustable from 0 - 100%
Vacuum pumps:
- In different sizes and from various manufacturers (with active carbon filter, if required)
4. Tetra 30
Basic equipment
- The housing size varies depending on the components/options
- Chamber volumes: 34 - 57 litres, depending on the version
- Power supply: 230 V or 400 V/3-phase
Gas supply
- Mass Flow Controllers (MFCs)
Vacuum chambers
- Stainless steel, rectangular, hinged door
(approx. W 305 mm x D 370 mm or 625 mm)
Loading
- Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes
- Single, or multiple levels
- RIE electrodes with gas shower
Control
- Semi-automatic
- PCCE control (Microsoft Windows CE)
- PC control (Microsoft Windows POS Ready 2009)
Pressure Measurement
- Pirani
- Baratron (for corrosive gas version)
Timer
Generators Frequencies:
- 40 kHz: Power 0 - 1000 W; 0 - 1500 W; 0 - 2500 W
- 13.56 MHz: Power 0 - 300 W; 0 - 600 W
- 2.45 GHz: Power 0 - 600 W; 0 - 1200 W
All generators are continuously adjustable from 0 - 100%
Vacuum pumps:
- In different sizes and from various manufacturers (as required with activated carbon filter)
5. Tetra 150
Basic equipment
- The housing size varies depending on the components/options
- Chamber volumes: 150 litres, depending on the version
- Power supply: 230 V or 400 V/3-phase
Gas supply
- Mass Flow Controllers (MFCs)
Vacuum chambers
- Stainless steel, rectangular, hinged door
(approx. W 400 x H 600 mm x D 625 mm)
Loading
- Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes
- Single, or multiple levels
- RIE electrodes with gas shower
Control
- Semi-automatic
- PCCE control (Microsoft Windows CE)
- PC control (Microsoft Windows POS Ready 2009)
Pressure Measurement
- Pirani
- Baratron (for corrosive gas version)
Timer
Generators Frequencies:
- 40 kHz: Power 0 - 1000 W; 0 - 1500 W; 0 - 2500 W
- 13.56 MHz: Power 0 - 300 W; 0 - 600 W; 0 - 1000 W
- 2.45 GHz: Power 0 - 1200 W
All generators are continuously adjustable from 0 - 100%
Vacuum pumps:
- In different sizes and from various manufacturers (as required with activated carbon filter)
